Design and simulation of aluminum bifunctional spatial light modulator

Author

Xiong, Xingguo ; Dallas, Tim ; Gangopadhyay, Shubhra ; Berg, Jordan ; Henryk, Temkin

Author_Institution

Dept. of Electr. & Comput. Eng., Cincinnati Univ., OH, USA

fYear

2005

fDate

7-10 Aug. 2005

Firstpage

159

Abstract

In this paper, a bifunctional aluminum MEMS spatial light modulator (micromirror) device design is introduced. The bifunctional mirror can work in both torsional and piston modes, depending on the voltage applied to the bottom driving electrodes. The mirror was fabricated with thick photoresist sacrificial layer technique. The working principle and performance of the micromirror are analyzed. Based upon the analysis, an optimized micromirror design is proposed. The mirror can deflect for a maximum displacement of 1.3μm in its piston mode, and rotate for a maximum angle of 3.1° in its torsional mode. The micromirror can be used to modulate the phase as well as the direction of the incident light due to its bifunctional modes.

Keywords

aluminium; micromechanical devices; micromirrors; photoresists; spatial light modulators; Al; MEMS modulator; bifunctional micromirrors; bifunctional spatial light modulator; piston mirrors; thick photoresist sacrificial layer technique; torsional mirrors; Aluminum; Electrodes; Micromechanical devices; Micromirrors; Mirrors; Optical modulation; Performance analysis; Pistons; Resists; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2005. 48th Midwest Symposium on

Print_ISBN

0-7803-9197-7

Type

conf

DOI

10.1109/MWSCAS.2005.1594063

Filename

1594063