Emission characteristics of microminiature thermionic vacuum (MTV) diodes

Author

Sadwick, L.P. ; Zhang, Y.Z. ; Zhang, T.H. ; Schaeffer, D.J. ; Petelenz, D. ; Hwu, R.J.

Author_Institution

Dept. of Electr. Eng., Utah Univ., Salt Lake City, UT, USA

fYear

1995

fDate

July 30 1995-Aug. 3 1995

Firstpage

522

Abstract

Summary form only given. Details of the emission characteristics of a thermionic analog to field emitter vacuum microelectronics will be presented. These microminiature thermionic vacuum (MTV) emitters are fabricated using micromachining and semiconductor manufacturing process technology and can be fabricated on any substrate. A salient feature of MTV technology is the use of a suspended filament that can be easily coupled with a low work function cathode which greatly reduces the thermal load and stress of the system.

Keywords

diodes; thermionic electron emission; thermionic tubes; vacuum microelectronics; MTV technology; emission characteristics; fabrication; low work function cathode; micromachining; microminiature thermionic vacuum diode; semiconductor manufacturing; stress; suspended filament; thermal load; vacuum microelectronics; Cathodes; Cities and towns; Electron beams; Electron tubes; Scanning electron microscopy; Semiconductor diodes; Thermal stresses; Thermionic emission; Transmission electron microscopy; Vacuum technology;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1995. IVMC., 1995 International

Conference_Location

Portland, OR, USA

Print_ISBN

0-7803-2143-X

Type

conf

DOI

10.1109/IVMC.1995.487105

Filename

487105