Optical Characterization Of SnO2 thin Films, Prepared by Sol Gel Method, for "Honeycomb" Textured Silicon Solar Cells

Author

Manea, E. ; Budianu, E. ; Purica, M. ; Podaru, C. ; Popescu, A. ; Cernica, I. ; Babarada, F.

Author_Institution

National Inst. for Res. & Dev. in Microtechnologies, Bucharest

Volume

1

fYear

2006

fDate

27-29 Sept. 2006

Firstpage

179

Lastpage

182

Abstract

This paper presents a new silicon solar cell structure obtained by texturisation of the front surface using silicon micromachining technologies. The textured surface of the solar cell reduces frontal reflectivity, in order to consequently obtain the lowest possible reflectance. Heterojunction SnO₂:In/n silicon substrate (\´\´honeycomb" textured) solar cells were manufactured by the sol gel method over textured p and n-type single CZ crystal silicon substrate wafers, with <100> orientation., rejected from the MOS integrated technology process. The obtained textured structures were studied by SEM and by optical and spectrophotometric measurements

Keywords

indium; micromachining; scanning electron microscopy; silicon; sol-gel processing; solar cells; spectrophotometry; surface texture; thin films; tin compounds; SEM; SnO₂; SnO₂ thin films; honeycomb textured silicon solar cells; n-type single CZ crystal; optical characterization; optical measurements; p-type single CZ crystal; silicon micromachining technologies; silicon solar cell structure; silicon substrate wafers; sol gel method; spectrophotometric measurements; Indium; Optical films; Optical refraction; Optical surface waves; Optical variables control; Photovoltaic cells; Semiconductor thin films; Silicon; Surface texture; Tin; Light trapping-3; Silicon-1; Solar Cells-4; Texturisation-2; sol-gel method-5;

fLanguage

English

Publisher

ieee

Conference_Titel

International Semiconductor Conference, 2006

Conference_Location

Sinaia

Print_ISBN

1-4244-0109-7

Type

conf

DOI

10.1109/SMICND.2006.283962

Filename

4063189