DocumentCode
325827
Title
Plasma Grown Oxides On Single Crystal And Amorphous Silicon Substrates
Author
Zhang, J.F. ; Taylor, S. ; Eccleston, W. ; Law, M.E. ; Allsopp, D.W.E.
Author_Institution
University of Liverpool
fYear
1990
fDate
32989
Firstpage
7
Lastpage
11
fLanguage
English
Publisher
iet
Conference_Titel
Silicon Today, IEE Colloquium on
Conference_Location
IET
Type
conf
Filename
696107
Link To Document