A room temperature NbN bolometer for terahertz detection

Author

Lu, X.H. ; Kang, L. ; Chen, J. ; Zhong, Y.Y. ; He, N. ; Jiang, Y. ; Liang, M. ; Yao, Q.J. ; Shi, S.C.

Author_Institution

Dept. of Electron. Sci. & Eng., Nanjing Univ., Nanjing

fYear

2008

fDate

15-19 Sept. 2008

Firstpage

1

Lastpage

2

Abstract

Using RF magnetron sputtering and electronic beam lithography, a NbN microbolometer integrated with a planar logarithm periodic antenna is fabricated on a SiO₂/Si (100) substrate for detecting signals from 0.05 THz to 0.4 THz. The best attainable responsivity of the device is about 100 volts per watt at 300 K.

Keywords

bolometers; electron beam lithography; niobium compounds; sputter deposition; superconducting materials; superconducting microwave devices; superconducting thin films; terahertz wave detectors; NbN; RF magnetron sputtering; SiO₂-Si; electronic beam lithography; frequency 0.05 THz to 0.4 THz; planar logarithm periodic antenna; room temperature NbN microbolometer; temperature 293 K to 298 K; temperature 300 K; terahertz detection; Bolometers; Lithography; Radio frequency; Sputtering; Substrates; Superconducting films; Superconducting magnets; Temperature sensors; Thermal conductivity; Thermal resistance;

fLanguage

English

Publisher

ieee

Conference_Titel

Infrared, Millimeter and Terahertz Waves, 2008. IRMMW-THz 2008. 33rd International Conference on

Conference_Location

Pasadena, CA

Print_ISBN

978-1-4244-2119-0

Electronic_ISBN

978-1-4244-2120-6

Type

conf

DOI

10.1109/ICIMW.2008.4665411

Filename

4665411