Research of material transfer software platform in IC equipment controlling system

Author

Yanan Wang ; Mingzhe Liu ; Yuanfeng Liu

Author_Institution

Shenyang Inst. of Autom., Shenyang, China

fYear

2013

fDate

23-25 May 2013

Firstpage

239

Lastpage

242

Abstract

This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve user´s development efficiency, and has good application prospects.

Keywords

control engineering computing; production control; production engineering computing; production equipment; semiconductor device manufacture; software engineering; IC equipment controlling system; independent software module development; material transfer software platform; semiconductor equipment controlling system; semiconductor equipment manufacturing; unified interfaces; user development efficiency improvement; Chaotic communication; Educational institutions; XML; material transfer; rapid development; semiconductor equipment control system; versatility;

fLanguage

English

Publisher

ieee

Conference_Titel

Software Engineering and Service Science (ICSESS), 2013 4th IEEE International Conference on

Conference_Location

Beijing

ISSN

2327-0586

Print_ISBN

978-1-4673-4997-0

Type

conf

DOI

10.1109/ICSESS.2013.6615296

Filename

6615296