• DocumentCode
    3279927
  • Title

    Wire detection using single-slit diffraction

  • Author

    Xiao, Yong ; Zhu, Kuanyi ; Zhang, Chi

  • Author_Institution
    Coll. of Inf. Eng., Shenyang Uni. of Chem. Technol., Shenyang, China
  • fYear
    2011
  • fDate
    15-17 April 2011
  • Firstpage
    948
  • Lastpage
    951
  • Abstract
    This paper presents a wire detection method using single-slit diffraction. A laser head generates the light beam, and an optical slit is introduced in the path of light source to a wire, so that diffraction pattern generated by the slit will be projected to the receiving screen, and irradiance loss could be observed, due to the presence of a wire. Simulation result demonstrates that the design can render certain detection sensitivity for slim wires.
  • Keywords
    inspection; integrated circuit interconnections; optical sensors; detection sensitivity; diffraction pattern; inspection; interconnect; irradiance loss; single-slit diffraction; wire detection; Bonding; Diffraction; Laser beams; Microelectronics; Optical diffraction; Wires; Diffraction; irradiance; slit; wire detection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electric Information and Control Engineering (ICEICE), 2011 International Conference on
  • Conference_Location
    Wuhan
  • Print_ISBN
    978-1-4244-8036-4
  • Type

    conf

  • DOI
    10.1109/ICEICE.2011.5777594
  • Filename
    5777594