Effect of laser deflection on resonant cantilever sensors

Author

Yang, Chung-Kai ; Bossche, Andre ; French, Paddy J. ; Sadeghian, Hamed ; Goosen, Johannes F. ; Van Keulen, Fred ; Gavan, Khashayar Babaei ; Van der Zant, Herre S J ; Van der Drift, Emile W J M

Author_Institution

Electron. Instrum. Lab., Tech. Univ. Delft, Delft, Netherlands

fYear

2009

fDate

25-28 Oct. 2009

Firstpage

869

Lastpage

872

Abstract

Laser beam deflection is a well known method commonly used in detecting resonance frequencies in atomic force microscopes and in mass/force sensing. The method focuses a laser spot on the surface of cantilevers to be measured, which might change the mechanical properties of the cantilevers and affect the measurement accuracy. In this work we showed that the joule heating of the laser, besides other extrinsic effects such as surface contamination, can cause a significant amount of shift in the resonator. The longer and softer the cantilever is, the more significant the effect. We suggest that the laser effects on the resonant response of sensors have to be taken into account.

Keywords

atomic force microscopy; cantilevers; elemental semiconductors; force sensors; frequency measurement; measurement by laser beam; optical resonators; optical sensors; silicon; atomic force microscopes; force sensing; joule heating; laser beam deflection; mass sensing; mechanical properties; resonance frequencies; resonant cantilever sensors; surface contamination; Atom lasers; Atomic force microscopy; Force sensors; Laser beams; Mechanical sensors; Mechanical variables measurement; Pollution measurement; Resonance; Surface contamination; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2009 IEEE

Conference_Location

Christchurch

ISSN

1930-0395

Print_ISBN

978-1-4244-4548-6

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2009.5398240

Filename

5398240