Towards high resolution pico-projector applications: Design improvements on MEMS scanning mirror

Author

Ma, Wei ; Chan, Ho- Yin ; Wong, Chun Cheong ; Yiu, Checky ; Chan, Yick Chuen ; Lee, Francis Chee Shuen

Author_Institution

Mater. & Packaging Technol. Group, Hong Kong Appl. Sci. & Technol. Res. Inst. Co. Ltd., Hong Kong, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

831

Lastpage

834

Abstract

Design and implementation of a micro scanning mirror for the application of WVGA resolution (848×480) pico-projector display is presently reported. A FEM model for damping coefficient analysis is built and shows a good agreement with experiment result. In addition, stress study for the torsional bar is performed to deal with fracture issue. With the consideration on damping coefficient and stress in torsional bar, the new designed and implemented micro scanning mirror has shown to have a >;6° scanning angle at 21kHz resonant frequency.

Keywords

damping; finite element analysis; micromechanical devices; micromirrors; optical projectors; MEMS scanning mirror; damping coefficient analysis; finite element model; frequency 21 kHz; high resolution pico-projector; scanning angle; torsional bar; Analytical models; Damping; Finite element methods; Mirrors; Oscillators; Resonant frequency; Stress; WVGA resolution; damping coefficient; maximum stress; pico- projector; scanning mirror;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017482

Filename

6017482