DocumentCode
3284005
Title
Magnetic Properties of Atomic-Layer-Deposited Hafnium Dioxide
Author
Chen, H.-Y. ; Ye, P.D. ; Murray, J. ; Xiong, P. ; von Molnar, S. ; Wilk, G.D.
fYear
2005
fDate
Dec. 7-9, 2005
Firstpage
217
Lastpage
218
Keywords
Crystallization; Hafnium oxide; Magnetic field measurement; Magnetic films; Magnetic materials; Magnetic properties; Magnetosphere; Rapid thermal annealing; Temperature dependence; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Device Research Symposium, 2005 International
Print_ISBN
1-4244-0083-X
Type
conf
DOI
10.1109/ISDRS.2005.1596060
Filename
1596060
Link To Document