Design and simulation of novel decoupled microgyroscopes with trench isolation

Author

Yan, Xin ; Zheng, Xiaoshan ; San, Haisheng ; Che, Lingjuan ; Chen, Xuyuan

Author_Institution

Pen-Tung Sah Micro-Nano Technol. Res. Center, Xiamen Univ., Xiamen, China

fYear

2011

fDate

20-23 Feb. 2011

Firstpage

1052

Lastpage

1055

Abstract

In this paper, a novel decoupled microgyroscopes was designed and simulated. The device named as MS-Gyro is partially decoupled structure. The trench isolation technology is introduced in new design. The new design consists of drive frame, sense frame, movable sense electrode, springs and isolation connection. The movable sense electrodes connect with the drive frame directly and are isolated from drive frame electrically. The ANSYS™ software has been used to simulate two types of decoupled microgyroscopes. A comparison has also been made between new design and conventional partially decoupled (CPD) design. The natural frequencies of drive and sense modes of two designs are 8562 Hz and 8598 Hz for MS-gyro, 8522 Hz and 8588 Hz for CPD Gyro, respectively. The results show that the MS-gyro suppresses quadrature-error effect better than CPD gyro.

Keywords

electrodes; gyroscopes; isolation technology; microsensors; ANSYS software; CPD design; MS-gyro suppresses quadrature-error effect; conventional partial decoupled design; decoupled microgyroscopes; frequency 8522 Hz; frequency 8562 Hz; frequency 8588 Hz; frequency 8598 Hz; movable sense electrode; trench isolation technology; Drives; Electrodes; Force; Gyroscopes; Sensors; Silicon; Springs; MEMS; decoupling of systems; microgyroscope; trench isolation;

fLanguage

English

Publisher

ieee

Conference_Titel

Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on

Conference_Location

Kaohsiung

Print_ISBN

978-1-61284-775-7

Type

conf

DOI

10.1109/NEMS.2011.6017537

Filename

6017537