DocumentCode
3284594
Title
An asymmetric PI hysteresis model for piezoceramics in nanoscale AFM imaging
Author
Wang, Dong ; Dong, Zaili ; Jiao, Niandong ; Yuan, Shuai ; Zhou, Lei ; Li, Wen J.
Author_Institution
State Key Lab. of Robot., Chinese Acad. of Sci., Shenyang, China
fYear
2011
fDate
20-23 Feb. 2011
Firstpage
1075
Lastpage
1079
Abstract
A modified Prandtl-Ishlinskii (PI) model, referred to as an asymmetric PI model, is implemented to reduce the displacement error between the model and the actual trajectory of a piezoceramic actuator used for AFM-based nanoscale imaging. The fact that the standard PI model is symmetric, while the actual hysteresis loop of a piezoceramic actuator is asymmetric, assures scanning errors if the standard PI operator is used. In order to improve the accuracy of the model, instead of using the same slope values in the entire PI model, different slope values to describe the forward loop (voltage increase) and the backward loop (voltage decrease) is proposed. The accuracy of the asymmetric PI model is validated on a custom-built AFM by comparing the experimental results derived from it with the results for the standard PI model.
Keywords
atomic force microscopy; dielectric hysteresis; nanoelectromechanical devices; nanopositioning; piezoceramics; piezoelectric actuators; AFM based nanoscale imaging; asymmetric PI hysteresis model; backward loop; displacement error; forward loop; modified Prandtl-Ishlinskii model; nanoscale AFM imaging; piezoceramic actuator; piezoceramics; Actuators; Computational modeling; Correlation; Feedforward neural networks; Hysteresis; Imaging; Piezoelectric materials; AFM hysteresis; AFM imaging; Nano-manipulation; nano-imaging; piezo-actuator;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2011 IEEE International Conference on
Conference_Location
Kaohsiung
Print_ISBN
978-1-61284-775-7
Type
conf
DOI
10.1109/NEMS.2011.6017543
Filename
6017543
Link To Document