MOD deposited thin film BST based bulk acoustic wave resonators

Author

Kalkur, T.S. ; Sbrockey, N. ; Tompa, G.S.

Author_Institution

Dept. of Electr. & Comput. Eng., Univ. of Colorado at Colorado Springs, Colorado Springs, CO, USA

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

4

Abstract

A tunable BST solidly mounted bulk resonator has been designed, fabricated and characterized using vector network analyzer. The solidly mounted resonator was implemented using an acoustic Bragg reflector of alternating high impedance tantalum oxide and low impedance silicon layers. The films were deposited using spin-on MOD technique. The resonator demonstrated a frequency tunability of 1% for an applied bias voltage from 3V to 10V with a shift in resonance frequency from 4.232179 GHz to 4.184941 GHz. The quality factor of the resonator was found to depend on the applied bias and a maximum quality factor of 97 was obtained at a DC bias voltage of 10 volts.

Keywords

Q-factor; acoustic resonators; barium compounds; dielectric resonators; ferroelectric thin films; strontium compounds; Ba_0.7Sr_0.3TiO₃; DC bias voltage; MOD deposited thin film BST; acoustic Bragg reflector; alternating high impedance tantalum oxide; bulk acoustic wave resonators; frequency 4.23 GHz to 4.18 GHz; frequency tunability; high dielectric constant ferroelectrics; low impedance silicon layers; quality factor; tunable BST solidly mounted bulk resonator; vector network analyzer; voltage 3 V to 10 V; Acoustic waves; Capacitors; Electrodes; Films; Q factor; Resonant frequency; Acoustic wave; BST; quality factor; reonance frequency; resonator;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp

Conference_Location

Aveiro

Print_ISBN

978-1-4673-2668-1

Type

conf

DOI

10.1109/ISAF.2012.6297726

Filename

6297726