Composition profiling of piezoelectric PZT thin films deposited onto Cu coated polymer substrates

Author

Kleiner, A. ; Suchaneck, G. ; Adolphi, B. ; Gerlach, G. ; Lavrentiev, V. ; Hubicka, Z. ; Cada, M. ; Jastrabik, L. ; Dejneka, A.

Author_Institution

Inst. of Solid State Electron., Tech. Univ. Dresden, Dresden, Germany

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

3

Abstract

In this work, we investigate the composition profile of nanocrystalline Pb(Zr, Ti)O₃ (PZT) thin films deposited by means of reactive magnetron sputtering from 200 mm diameter metallic targets (Pb, Ti, Zr). High-power pulse sputtering has been employed for alternatively the Zr- or Ti-target. Composition analysis and profiling was performed by means of X-ray photoelectron spectroscopy (XPS) and Rutherford backscattering (RBS). RBS data was recalibrated to exclude hydrogen content not determined by XPS. Advantages and drawbacks of both methods for PZT composition profiling are discussed.

Keywords

Rutherford backscattering; X-ray photoelectron spectra; lead compounds; piezoceramics; piezoelectric thin films; sputter deposition; PZT; Rutherford backscattering; X-ray photoelectron spectroscopy; XPS; composition profiling; copper-coated polymer substrates; high-power pulse sputtering; piezoelectric thin films; reactive magnetron sputtering; Films; Lead; Polymers; Sputtering; Substrates; Surface treatment; Zirconium; PZT; RBS; XPS; polymer substrate; thin film;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp

Conference_Location

Aveiro

Print_ISBN

978-1-4673-2668-1

Type

conf

DOI

10.1109/ISAF.2012.6297777

Filename

6297777