Pulsed laser deposited-PZT based MEMS energy harvesting devices

Author

Jambunathan, Madhusudhanan ; Elfrink, Rene ; Vullers, Ruud ; van Schaijk, R. ; Dekkers, Matthijn ; Broekmaat, Joska

Author_Institution

Imec/Holst Centre, Eindhoven, Netherlands

fYear

2012

fDate

9-13 July 2012

Firstpage

1

Lastpage

4

Abstract

PZT thin films are a huge attraction in the rapid growing MEMS field, especially in the field of energy harvesting. This paper describes the PLD deposited PZT thin film growth and its integration into MEMS energy harvesting devices. We have shown a maximum power output of 51 μW with 63.6 μW/g² sensitivity for a sinusoidal input excitation. The potential applications of these vibrational harvesters in car tires are explored by applying a shock input excitation.

Keywords

dielectric thin films; energy harvesting; lead compounds; micromechanical devices; piezoelectric devices; pulsed laser deposition; vibrational modes; PZT; PZT thin films; power output; pulsed laser deposited-PZT based MEMS energy harvesting devices; shock input excitation; vibrational harvesters; Acceleration; Electric shock; Energy harvesting; Films; Micromechanical devices; Resonant frequency; Tires; PZT; shock excitation; vibrational energy harevsting;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics held jointly with 2012 European Conference on the Applications of Polar Dielectrics and 2012 International Symp Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials (ISAF/ECAPD/PFM), 2012 Intl Symp

Conference_Location

Aveiro

Print_ISBN

978-1-4673-2668-1

Type

conf

DOI

10.1109/ISAF.2012.6297807

Filename

6297807