DocumentCode
3287359
Title
Gas ambient dependence of quality factor in MEMS resonators
Author
Li, Q. ; Goosen, J.F.L. ; van Keulen, F. ; van Beek, J.T.M.
Author_Institution
Mater. Innovation Inst., Delft, Netherlands
fYear
2009
fDate
25-28 Oct. 2009
Firstpage
1040
Lastpage
1043
Abstract
In this paper, the gas dependence of the Q factor in MEMS resonators is investigated and verified by the measurements in different ambient gases, with pressures changing from vacuum to atmosphere. The experimental results agree favorably with the existing theoretical models. The findings in the work suggest that low molecular weight gasses can be used to enhance the Q factor without the need for external low pressure.
Keywords
Q-factor; micromechanical resonators; MEMS resonators; gas ambient dependence; low molecular weight gasses; quality factor; Atmospheric measurements; Damping; Gases; Micromechanical devices; Packaging; Q factor; Q measurement; Resonance; Technological innovation; Wafer scale integration;
fLanguage
English
Publisher
ieee
Conference_Titel
Sensors, 2009 IEEE
Conference_Location
Christchurch
ISSN
1930-0395
Print_ISBN
978-1-4244-4548-6
Electronic_ISBN
1930-0395
Type
conf
DOI
10.1109/ICSENS.2009.5398588
Filename
5398588
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