DocumentCode
3288550
Title
Macro, micro, nano, and beyond - Keynote talk
fYear
2004
fDate
14-16 July 2004
Abstract
Provides an abstract of the keynote presentation and a brief professional biography of the presenter. The complete presentation was not made available for publication as part of the conference proceedings.
Keywords
Acceleration; Bridges; Electron tubes; Information science; Lithography; Manufacturing automation; Microelectronics; Nanotechnology; Societies; Wiring;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
Conference_Location
San Jose, CA, USA
ISSN
1089-8190
Print_ISBN
0-7803-8582-9
Type
conf
DOI
10.1109/IEMT.2004.1321617
Filename
1321617
Link To Document