DocumentCode
3290939
Title
Degradation of formed metal-insulator-metal cathodes under pulsed bias
Author
Kramor, Sergei S. ; Troyan, Pavel E. ; Khaskelberg, Mikhail B.
Author_Institution
Tomsk State Acad. of Control Syst. & Radioelectron., Russia
fYear
1996
fDate
7-12 Jul 1996
Firstpage
158
Lastpage
161
Abstract
The dependence of a degradation process in formed Mo-SiO2 -Ag cathodes operating in a pumped vacuum chamber on the pulse height, pulse width, duty cycle and device temperature ranging between 7 V and 14 V, 1 ms and 1000 ms, 5% and 50%, 300 K and 413 K respectively, was studied. It has been found that the effective rate of an increase in the diameter of emission centers, ve, is not affected by the pulse width or duty cycle and increases with temperature. The voltage dependence of ve has a maximum at ~12 V. It has been concluded that the same degradation mechanism, which is due to cumulative processes, is operating in both pulsed and constant voltage modes. The results of this work lend further support to the idea that the degradation of formed metal-insulator-metal cathodes is caused by the creation of new emission centers along the perimeters of the ones already present
Keywords
MIM devices; cathodes; electron field emission; molybdenum; silicon compounds; silver; vacuum microelectronics; 1 to 1000 ms; 300 to 413 K; 7 to 14 V; Mo-SiO2-Ag; Mo-SiO2-Ag cathodes; degradation mechanism; degradation process; device temperature; duty cycle; emission centers; formed MIM cathodes; pulse height; pulse width; pulsed bias; pulsed voltage mode; pumped vacuum chamber; voltage dependence; Cathodes; Degradation; Electrodes; Insulation; Metal-insulator structures; Space vector pulse width modulation; Sputtering; Temperature dependence; Vacuum systems; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location
St. Petersburg
Print_ISBN
0-7803-3594-5
Type
conf
DOI
10.1109/IVMC.1996.601796
Filename
601796
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