Graphene resonant channel transistor

Two kinds of doubly clamped beam graphene resonant channel transistors (RCTs) with local gate configurations, fabricated by direct exfoliation and transfer are presented in this paper. The RCTs are actuated and detected directly by using a vector network analyzer. And the measurement results show that the exfoliation RCT and transfer RCT have resonant frequencies of ~34MHz at 77K and ~88MHz at 300K, respectively. The operation principle of radio frequency (RF) RCT is detailed in this paper. And a compact electrical equivalent circuit model has been given out based on the analysis of electromechanical model of doubly clamped beam and field effect transistor theory. The results show that excellent agreements have been achieved between the experimental results and the simulation results. With the proposed compact model, the RCTs can be useful for developing high sensitivity sensor, or in the perspective of high quality RF filters by using graphene nano-electromechanical systems(NEMS).