DocumentCode
329254
Title
Novel Process For A Monolithic Integrated Accelerometer
Author
Offenberg, M. ; Larmer, F. ; Elsner, B. ; Munzel, H. ; Riethmuller, W.
Author_Institution
R. Bosch GmbH, Automotive Equip. Div.
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
589
Lastpage
592
Keywords
Accelerometers; Annealing; BiCMOS integrated circuits; Capacitive sensors; Fabrication; Integrated circuit technology; Sensor phenomena and characterization; Surface topography; Temperature sensors; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717293
Filename
717293
Link To Document