DocumentCode

329263

Title

Self-excited Force Sensing Microcantilevers With Piezoelectric Thin Films For Dynamic Scanning Force Microscopy

Author

Itoh, Toshihiro ; Suga, Tadatoino

Author_Institution

The University of Tokyo

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

632

Lastpage

635

Keywords

Chromium; Fabrication; Force sensors; Gold; Microscopy; Oscillators; Piezoelectric films; Plasma temperature; Voltage; Zinc oxide;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717309

Filename

717309