In Situ Modification Of The NO_x And CO Sensitivity Of Thin Pt-gate MOSFET´s

Author

Zubkans, J. ; Spetz, A. Lloyd ; Sundgren, H. ; Winquist, F. ; Kleperis, J. ; Lusis, A. ; Lundstrom, I.

Author_Institution

Linkoping Institute of Technology

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

726

Lastpage

729

Keywords

Argon; Gas detectors; Gases; Hydrogen; MOSFET circuits; Physics; Polarization; Semiconductor films; Solid state circuits; Threshold voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717334

Filename

717334

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