Enhancement of electron emission efficiency of Mo-tips by diamond-like carbon coatings

Author

Chuang, F.Y. ; Sun, C.Y. ; Cheng, H.F. ; Wang, W.C. ; Huang, C.M. ; Lin, I.N.

Author_Institution

Dept. of Electron. Eng., Nat. Taiwan Inst. of Technol., Taipei, Taiwan

fYear

1996

fDate

7-12 Jul 1996

Firstpage

339

Lastpage

343

Abstract

The effect of diamond like carbon (DLC) films coated by pulsed laser deposition technique on the electron emission characteristics of Mo-tips is examined. Turn-on voltage (Vo) was lowered from 40 volts for Mo-tips to 22 volts for DLC coated Mo-tips and maximum anode current (I _A) was increased from ~44 μA for Mo-tips to ~2.0 mA for DLC coated Mo-tips. Maximum anode current (I_A) for the DLC coated Mo-tips, however, decreased during operation. Raman spectroscopy and selected area diffraction (SAD) in transmission electron microscopy (TEM) revealed that the degradation of electron emission behavior can be ascribed to the conversion of SP³-bonds, characteristics for diamond, to SP²-bonds, characteristics for graphite. The transformation of the structure is assumed to be induced by the local heat from the DLC coatings

Keywords

Raman spectra; carbon; electron field emission; molybdenum; pulsed laser deposition; transmission electron microscopy; vacuum microelectronics; 2 mA; 22 V; C-Mo; DLC coated tips; DLC films; Mo tips; Raman spectroscopy; SP²-bonds; SP³-bonds conversion; TEM; diamond-like C coatings; electron emission efficiency; local heating; maximum anode current; pulsed laser deposition technique; selected area diffraction; transmission electron microscopy; turn-on voltage; Anodes; Carbon dioxide; Diamond-like carbon; Diffraction; Electron emission; Optical pulses; Pulsed laser deposition; Raman scattering; Spectroscopy; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International

Conference_Location

St. Petersburg

Print_ISBN

0-7803-3594-5

Type

conf

DOI

10.1109/IVMC.1996.601837

Filename

601837