• DocumentCode
    3294968
  • Title

    New QCM Sensor for Real-time AMC Detection in SMIF Pods

  • Author

    Takasu, Ryozo ; Akbar, Asneil ; Takigawa, Yukio ; Miyajima, Motoshu ; Kataoka, Yuji

  • Author_Institution
    Fujitsu Labs. Ltd., Atsugi
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Firstpage
    421
  • Lastpage
    423
  • Abstract
    We have developed a new type of QCM sensor for real-time detection of chemical contaminant emission in SMIF pods. Because there is no need to modify SMIF pods when applying this sensor, introducing the QCM system to fabrication lines is very easy.
  • Keywords
    chemical sensors; chemical variables measurement; microbalances; quartz; QCM sensor; SMIF pods; chemical contaminant emission; quartz crystal microbalance sensor; real-time AMC detection; Chemical processes; Coaxial cables; Contamination; Equations; Fabrication; Laboratories; Resonance; Resonant frequency; Sampling methods; Sensor systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4493125
  • Filename
    4493125
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3294968