• DocumentCode
    3295187
  • Title

    Monte Carlo Simulation of Silicon Nanowhiskers Growth

  • Author

    Nastovjak, Alla G. ; Shwartz, Nataliya L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.

  • Author_Institution
    Novosibirsk State Tech. Univ., Novosibirsk
  • fYear
    2007
  • fDate
    June 1 2007-July 5 2007
  • Firstpage
    45
  • Lastpage
    49
  • Abstract
    Examination of silicon nanowhiskers (NWs) growth on Si(111) surface activated by gold was carried out using Monte Carlo simulation. Dependence of NW length on gold drop size was obtained. It was shown that for given temperature and deposition rate there is optimal drop size corresponding to maximal whisker growth rate. Effect of surface wetting by drop material was investigated: for strong wettability whiskers grew curved and for weak - drop became too movable and could slide down from the whisker top. It was demonstrated that combination of two mechanisms of Si incorporation at Si-Au interface: diffusion through the drop bulk with following Si precipitation at interface and Si incorporation into drop perimeter due surface diffusion is the most optimal for vertical Si nanowhiskers growth.
  • Keywords
    Monte Carlo methods; elemental semiconductors; nanostructured materials; precipitation; silicon; surface diffusion; wetting; whiskers (crystal); Monte Carlo simulation; Si; drop size; nanowhiskers; precipitation; surface diffusion; surface wetting; Chemical vapor deposition; Gold; Lattices; Molecular beam epitaxial growth; Monte Carlo methods; Nanoscale devices; Packaging; Silicon; Surface morphology; Temperature sensors; Monte Carlo; nanowhisker; simulation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
  • Conference_Location
    Erlagol, Altai
  • ISSN
    1815-3712
  • Print_ISBN
    978-5-7782-0752-3
  • Type

    conf

  • DOI
    10.1109/SIBEDM.2007.4292903
  • Filename
    4292903