DocumentCode
3295187
Title
Monte Carlo Simulation of Silicon Nanowhiskers Growth
Author
Nastovjak, Alla G. ; Shwartz, Nataliya L. ; Yanovitskaja, Zoya Sh ; Zverev, Alexey V.
Author_Institution
Novosibirsk State Tech. Univ., Novosibirsk
fYear
2007
fDate
June 1 2007-July 5 2007
Firstpage
45
Lastpage
49
Abstract
Examination of silicon nanowhiskers (NWs) growth on Si(111) surface activated by gold was carried out using Monte Carlo simulation. Dependence of NW length on gold drop size was obtained. It was shown that for given temperature and deposition rate there is optimal drop size corresponding to maximal whisker growth rate. Effect of surface wetting by drop material was investigated: for strong wettability whiskers grew curved and for weak - drop became too movable and could slide down from the whisker top. It was demonstrated that combination of two mechanisms of Si incorporation at Si-Au interface: diffusion through the drop bulk with following Si precipitation at interface and Si incorporation into drop perimeter due surface diffusion is the most optimal for vertical Si nanowhiskers growth.
Keywords
Monte Carlo methods; elemental semiconductors; nanostructured materials; precipitation; silicon; surface diffusion; wetting; whiskers (crystal); Monte Carlo simulation; Si; drop size; nanowhiskers; precipitation; surface diffusion; surface wetting; Chemical vapor deposition; Gold; Lattices; Molecular beam epitaxial growth; Monte Carlo methods; Nanoscale devices; Packaging; Silicon; Surface morphology; Temperature sensors; Monte Carlo; nanowhisker; simulation;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location
Erlagol, Altai
ISSN
1815-3712
Print_ISBN
978-5-7782-0752-3
Type
conf
DOI
10.1109/SIBEDM.2007.4292903
Filename
4292903
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