DocumentCode
3297176
Title
Electron Emission From Gated Pt Emitters Fabricated By Electron Beam Induced Deposition
Author
Takai, M. ; Morimoto, H. ; Kishimoto, T. ; Lipp, S. ; Frey, L. ; Ryssel, H. ; Yura, S. ; Hosono, A. ; Okuda, S.
Author_Institution
Faculty of Engineering Science and Research Center for Ultra Science, Osaka University, Japan
fYear
1996
fDate
7-12 Jul 1996
Firstpage
657
Lastpage
657
Keywords
Argon; Atmosphere; Electron beams; Electron emission; Field emitter arrays; Gold; Hydrogen; Insulation; Research and development; Silicon on insulator technology;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Print_ISBN
0-7803-3594-5
Type
conf
DOI
10.1109/IVMC.1996.601914
Filename
601914
Link To Document