DocumentCode
3297668
Title
Micro-electromechanical variable capacitors for RF applications
Author
Tsang, Tommy K K ; El-Gama, Mourad N.
Author_Institution
Microelectron. & Comput. Syst. Lab., McGill Univ., Montreal, Que., Canada
Volume
1
fYear
2002
fDate
4-7 Aug. 2002
Abstract
This paper presents the principle of operation and design equations of MEMS-based variable capacitors designed using the MUMPs technology. Two prototypes with different tuning characteristics are examined. Measurements have shown that a tuning range of more than 35% is achievable at 2.4 GHz, with a self-resonant frequency of 4 GHz, and a maximum quality factor of 15. An analysis of the performance obtained is discussed, in the context of the characteristics of the fabrication process used.
Keywords
Q-factor; micromechanical devices; varactors; 2.4 GHz; 4 GHz; MEMS variable capacitor; MUMPs technology; RF passive component; fabrication process; quality factor; self-resonant frequency; tuning range; Application software; Capacitors; Gold; Micromachining; Micromechanical devices; Radio frequency; Springs; Switches; Tuning; Varactors;
fLanguage
English
Publisher
ieee
Conference_Titel
Circuits and Systems, 2002. MWSCAS-2002. The 2002 45th Midwest Symposium on
Print_ISBN
0-7803-7523-8
Type
conf
DOI
10.1109/MWSCAS.2002.1187144
Filename
1187144
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