• DocumentCode
    3299442
  • Title

    A sensitive bi-reflection surface plasmon resonance waveguide sensor based on SiON

  • Author

    Wei Zhang ; Xiaohai Xiong ; Luping Zhu ; Mingyu Li ; Jian-Jun He

  • Author_Institution
    State Key Lab. of Modern Opt. Instrum., Zhejiang Univ., Hangzhou, China
  • fYear
    2013
  • fDate
    26-28 July 2013
  • Firstpage
    1
  • Lastpage
    3
  • Abstract
    A high-performance bi-reflection surface plasmon resonance waveguide sensor based on SiON was proposed. The thickness of Ag is optimized. The detection limit and the sensitivity are improved at the expense of loss using two planar reflection surfaces. A sensitivity of 103.8degree/RIU or 2.86×104dB/RIU as well as a refractive index variation of 1×10-5RIU were measured.
  • Keywords
    biosensors; chemical sensors; refractive index; silicon compounds; silver; surface plasmon resonance; Ag; SiON; detection limit; planar reflection surfaces; refractive index; surface plasmon resonance waveguide sensor; Metals; Optical surface waves; Optical waveguides; Reflection; Refractive index; Sensitivity; Silicon; SPR; active metal; bi-reflection;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical Communications and Networks (ICOCN), 2013 12th International Conference on
  • Conference_Location
    Chengdu
  • Type

    conf

  • DOI
    10.1109/ICOCN.2013.6617199
  • Filename
    6617199
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3299442