Multi-layered Green function approach to 3D capacitance extraction with substrate loss

Author

Li, Cheng ; Zhang, Wenjun ; Yu, Zhiping

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

Volume

1

fYear

2004

fDate

31 May-2 June 2004

Firstpage

69

Abstract

Compact Green function over a multi-layered substrate is derived by solving Poisson equation analytically in the z (vertical) coordinate and numerically in the x and y (planar) coordinates. This Green function is used to extract 3D capacitance by integrating it in z coordinate analytically. The discrete cosine transform (DCT) and its variations are used for rapid evaluation. Using this technique, the substrate coupling and loss in IC circuits can be analyzed. Comparisons to several other tools verify the advantage of the technique.

Keywords

Green´s function methods; Poisson equation; analogue integrated circuits; discrete cosine transforms; integrated circuits; mixed analogue-digital integrated circuits; substrates; 3D capacitance extraction; IC circuit; Poisson equation; discrete cosine transform; multilayered Green´s function approach; multilayered substrate; Boundary conditions; Capacitance; Coupling circuits; Discrete cosine transforms; Green function; Microelectronics; Permittivity; Poisson equations; Space charge; Transmission line matrix methods;

fLanguage

English

Publisher

ieee

Conference_Titel

Emerging Technologies: Frontiers of Mobile and Wireless Communication, 2004. Proceedings of the IEEE 6th Circuits and Systems Symposium on

Print_ISBN

0-7803-7938-1

Type

conf

DOI

10.1109/CASSET.2004.1322919

Filename

1322919