A test structure for Young modulus extraction through capacitance-voltage measurements

We present a test structure for the on-line extraction of the Young´s modulus of materials used for micro-electro-mechanical systems (MEMS) applications. This non-contact method is simple and non-destructive and allows for a fully electronic probing and readout. A single test structure is configured to respond to a change in voltage through a change in capacitance and the change in capacitance is then related to the Young´s modulus and the device geometry. The device can also be used for simultaneous resonant frequency tests and measurement of pull-in voltage, thereby allowing for a multipoint orthogonal measurement. Experimental verification of the concept is presented in this paper. The test structure is fabricated in a silicon-on-insulator MEMS process allowing the extraction of the Young modulus of single-crystal silicon