DocumentCode

330630

Title

Reticle CD Latitude For Fabrication Of 0.18/spl mu/m Line Patterns

Author

Matsuura, S. ; Uchiyama, T. ; Fujimoto, M. ; Yamazaki, T. ; Hashimoto, T. ; Kasama, K.

Author_Institution

ULSI Device Development Labs., NEC Corp.

fYear

1998

fDate

13-16 July 1998

Firstpage

50

Lastpage

51

Keywords

Electronics industry; Fabrication; Linearity; Proximity effect;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.729955

Filename

729955