DocumentCode
330632
Title
Microelectromechancial Systems (MEMS) At The UCLA Micromanufacturing Lab
Author
Kim, Chang-Jin CJ
Author_Institution
University of California
fYear
1998
fDate
13-16 July 1998
Firstpage
54
Lastpage
55
Keywords
Aerospace engineering; Fabrication; Microchannel; Microinjection; Micromachining; Micromechanical devices; Micromotors; Microswitches; Surface tension; Wafer bonding;
fLanguage
English
Publisher
ieee
Conference_Titel
Microprocesses and Nanotechnology Conference, 1998 International
Conference_Location
Kyoungju, South Korea
Print_ISBN
4-930813-83-2
Type
conf
DOI
10.1109/IMNC.1998.729959
Filename
729959
Link To Document