• DocumentCode
    330634
  • Title

    Lithography CAD Technology For Embedded Memory In Logic

  • Author

    Ohnuma, Hidetoshi ; Tsudaka, Keisuke ; Kawahira, Hiroichi ; Nozawa, Satoru

  • Author_Institution
    Sony Corporation
  • fYear
    1998
  • fDate
    13-16 July 1998
  • Firstpage
    60
  • Lastpage
    61
  • Keywords
    Application specific integrated circuits; Databases; Error correction; Lithography; Logic design; Logic devices; Optical design; Random access memory; Resists; Shape measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microprocesses and Nanotechnology Conference, 1998 International
  • Conference_Location
    Kyoungju, South Korea
  • Print_ISBN
    4-930813-83-2
  • Type

    conf

  • DOI
    10.1109/IMNC.1998.729963
  • Filename
    729963
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=330634