DocumentCode

330701

Title

Two-Input.axis Angular Rate Sensor

Author

An, Seungdo ; Oh, Yongsoo ; Choi, Sang-on ; Song, Ci-Moo

Author_Institution

Samsung Advanced Institute of Technology

fYear

1998

fDate

13-16 July 1998

Firstpage

190

Lastpage

191

Keywords

Capacitance; Dry etching; Electrodes; Frequency; Gas detectors; Gyroscopes; Micromachining; Resonance; Torque; Wet etching;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730038

Filename

730038