DocumentCode

330770

Title

Step & Scan Lithography For Mass Production Applications

Author

Arnold, B. ; Koek, B. ; de Zwart, G. ; Luehrmann, P. ; Jenkins, P.

Author_Institution

ASM Lithography BV

fYear

1998

fDate

13-16 July 1998

Firstpage

335

Lastpage

335

Keywords

Apertures; Lighting; Lithography; Mass production; Optical imaging; Productivity;

fLanguage

English

Publisher

ieee

Conference_Titel

Microprocesses and Nanotechnology Conference, 1998 International

Conference_Location

Kyoungju, South Korea

Print_ISBN

4-930813-83-2

Type

conf

DOI

10.1109/IMNC.1998.730109

Filename

730109