DocumentCode
3316283
Title
Design and simulation of a integrated Mach-Zehnder interferometer sensor
Author
Ionita, Mihaela Roxana ; Kusko, Mihai
Author_Institution
Politeh. Univ. of Bucharest, Bucharest, Romania
Volume
02
fYear
2010
fDate
11-13 Oct. 2010
Firstpage
529
Lastpage
532
Abstract
In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.
Keywords
Mach-Zehnder interferometers; electron beam lithography; optical fabrication; optical sensors; refractive index measurement; analysis medium refractive index; e-beam lithography; integrated Mach-Zehnder interferometer sensor; polymeric materials; Indexes; Lithography; Materials; Numerical models; Optical waveguides; Refractive index; Sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Conference (CAS), 2010 International
Conference_Location
Sinaia
ISSN
1545-827X
Print_ISBN
978-1-4244-5783-0
Type
conf
DOI
10.1109/SMICND.2010.5650448
Filename
5650448
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