DocumentCode
3318710
Title
Polylithic integration of true single chip radio using quartz-on-silicon wafer
Author
Lee, Kwyro
Author_Institution
MICROS Res. Centre, Korea Adv. Inst. of Sci. & Technol., Seoul, South Korea
fYear
2001
fDate
2001
Firstpage
47
Abstract
Summary form only given. PLIC (polylithic integrated circuit) technology allows one to fabricate heterogeneous systems on a single wafer. In PLIC, various crystals are stacked vertically and different devices having optimum performance on each crystal, are fabricated then connected on the same wafer, all using IC fabrication technology. Then complete system is finally obtained as a single chip after dicing. Thus drastic reduction in cost and size and great improvement in performance and reliability are expected. In this presentation, PLIC using QoS (Quartz-on-Silicon) is taken as an example to demonstrate the feasibility of a true single chip radio, where RF and digital circuits, antenna, and electroacoustic filters are integrated on the same wafer
Keywords
integrated circuit reliability; integrated circuit technology; mixed analogue-digital integrated circuits; radio equipment; IC fabrication technology; PLIC; QoS; RF/digital circuits; SiO2-Si; electroacoustic filters; heterogeneous systems; polylithic integrated circuit; quartz-on-silicon; reliability; true single chip radio; Costs; Crystals; Fabrication; Filters; Integrated circuit technology; Mass production; Optimized production technology; Radio frequency; Semiconductor device modeling; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Electron Devices and Materials, 2001. Proceedings. 2nd Annual Siberian Russian Student Workshop on
Conference_Location
Erlagol, Altai
Print_ISBN
5-7782-0347-0
Type
conf
DOI
10.1109/SREDM.2001.939142
Filename
939142
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