Modeling of RF- MEMS BAW Resonator

Due to the demand of smaller and more portable devices the applications of MEMS resonators are rapidly increasing. Solidly mounted resonators (SMR) based on bulk acoustic wave (BAW) technology follow MEMS principles to build high performance microwave filters for RF communication. In this paper we will provide the architecture of SMRs by discussing the designing aspects of its core structures which are within foundry CMOS processes using RF design software advanced design system (ADS). Conventional VLSI processes are followed for the fabrication of the SMRs. The results from the fabricated data are compared and discussed.