EQ integrated pprocess trending with tfm monitoring for backend equipments

This paper addresses a new approach of equipment integrated process control with automated corrective action and online monitoring of processes with TFM (total fab monitoring), The TFM trending module combines the advantages of a standardized reporting tool with the flexibility of equipment-specific data acquisition. The tool enables detailed analyses of process parameters. It supports continuous fab monitoring purposes as well as process engineering analyses during ramp-up or process improvement projects. With the 2^nd approach this paper provides an overview and background of the needs to establish a standardized process reporting system for back-end. It shows examples of integrated process monitoring application using interface A for data acquisition. Several applications have automated process correction action and automated EQ "start/stop" function used as a "closed loop" failure detection and classification system (FDC)