Integration of lot dispatching and AMHS control in a 300mm wafer FAB

300 mm semiconductor manufacturing requires a full automated material handling system (AMHS). AMHS operation is tightly coupled with FAB production. Lot scheduling and dispatching are restricted by movement of material, while decisions for material move also should consider lot status and schedules. Therefore, AMHS should be well coordinated with the lot scheduling and dispatching. For the effectiveness of AMHS operation following three problems that directly cause the change of the material transportation and storage should be solved. The first problem is the stocker allocation which determines the best stocker considering AMHS status. The second is the WlP balancing between cells by controlling the transport timing. The third is the transport prioritization for maximizing the production productivity. In this research, we propose advanced functionalities and logistics for the three problems to improve the effectiveness of AMHS