Design of a linear switched reluctance motor for high precision applications

This paper describes the design of a linear switched reluctance motor (LSRM) for high-speed high-precision point-to-point motions. An S-shaped curve is first chosen as the trajectory motion profile and then a simple yet effective design procedure is introduced to design the motor´s mechanical dimensions. Theoretical deduction and experimental results on the phase inductance and the static force generation are presented and compared with each other. The final design has a simple and robust structure. Measurements from the fabricated LSRM show that the motor has met all design specifications. The resultant LSRM is very useful in high-precision applications, especially in semiconductor fabrication machineries