• DocumentCode
    3328190
  • Title

    Field emission from metal-particle bound with a photoresist

  • Author

    Baba, Akiyoshi ; Asano, Takashi

  • Author_Institution
    Center for Microelectron. Syst., Kyushu Inst. of Technol., Fukuoka, Japan
  • fYear
    2001
  • fDate
    2001
  • Firstpage
    235
  • Lastpage
    236
  • Abstract
    Proposes a film composed of metal particles for use in field electron emitter material on a large substrate. Test films were prepared on a silicon substrate from a mixture of palladium fine particles and positive tone photoresist. It was found that the photoresist at the surface acted as a barrier for electron emission. It was also found that the emission current abruptly increases with time evolution applying a constant voltage. After this phenomenon, the threshold voltage for electron emission was drastically decreased and the emission current became stable
  • Keywords
    cathodes; diodes; field emission displays; particle reinforced composites; photoresists; Pd; diode structure; emission current; field electron emitter material; field-emission displays; fine particles; metal particles; positive tone photoresist; threshold voltage; Electron emission; Electron guns; Inorganic materials; Palladium; Resists; Semiconductor films; Silicon; Substrates; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 2001. IVMC 2001. Proceedings of the 14th International
  • Conference_Location
    Davis, CA
  • Print_ISBN
    0-7803-7197-6
  • Type

    conf

  • DOI
    10.1109/IVMC.2001.939740
  • Filename
    939740