Chip-scale nanophotonic chemical and biological sensors using CMOS process

Author

Bollschweiler, Lincoln ; English, Alex ; Baker, R. Jacob ; Kuang, Wan ; Chang, Zi-Chang ; Shih, Ming-Hsiung ; Knowlton, William B. ; Hughes, William L. ; Lee, Jeunghoon ; Yurke, Bernard ; Cockerham, Nankyung Suh ; Tyree, Vance C.

Author_Institution

Boise State Univ., Boise, ID, USA

fYear

2009

fDate

2-5 Aug. 2009

Firstpage

913

Lastpage

916

Abstract

A monolithic integrated chip-scale surface plasmon resonance (SPR) sensor is demonstrated. The device consists of a pn photodiode covered with a periodic modified thin metal film whose lattice constant is on the order of the wavelength of light. The device performs real-time measurement of resonant wavelengths of enhanced optical transmission due to surface plasmon resonance, which are influenced by the presence of chemical or biological materials at the device´s surface.

Keywords

CMOS integrated circuits; chemical sensors; integrated optoelectronics; light transmission; nanophotonics; optical sensors; photodiodes; surface plasmon resonance; CMOS process; biological sensors; chip-scale nanophotonic chemical sensors; device surface; lattice constant; monolithic integrated chip-scale surface plasmon resonance sensor; optical transmission; periodic modified thin metal film; pn photodiode; real-time measurement; resonant wavelengths; Biosensors; CMOS process; Chemical and biological sensors; Nanobioscience; Optical films; Optical surface waves; Photodiodes; Plasmons; Resonance; Surface waves; CMOS transimpedance amplifier; photodiode; sensor; surface plasmon polariton;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2009. MWSCAS '09. 52nd IEEE International Midwest Symposium on

Conference_Location

Cancun

ISSN

1548-3746

Print_ISBN

978-1-4244-4479-3

Electronic_ISBN

1548-3746

Type

conf

DOI

10.1109/MWSCAS.2009.5235915

Filename

5235915