Development of robust microvalves for large flow rate robust hydraulic actuators

Author

Bo Li

Author_Institution

Mech., Mater. & Aerosp. Eng. Dept., Univ. of Central Florida, Orlando, FL, USA

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

96

Lastpage

99

Abstract

A robust microvalve has been designed, fabricated and tested for large flow rate robust hydraulic actuators. The objectives for the hydraulic actuator, same for the microvalve, are challenging for MEMS based microvalves with large flow rate (10 cc/sec), large pressure support ability (up to 10 MPa) and able to operate at frequency (10 kHz). The designed microvalve meets all these requirements based on the simulation results with micro reinforced valve flap and a valve stopper. The flow rate of the microvalve tested is about 20 cc/sec under pressure of 50 psi and no damages identified during repeating tests.

Keywords

microactuators; microvalves; 10 MPa; 10 kHz; 50 psi; MEMS based microvalve; large flow rate robust hydraulic actuators; large pressure support ability; robust microvalves; Aerospace engineering; Aerospace materials; Frequency; Hydraulic actuators; Micromechanical devices; Microvalves; Piezoelectric actuators; Robustness; Testing; Valves;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189696

Filename

1189696