• DocumentCode
    3332896
  • Title

    3D flexible multichannel probe array

  • Author

    Takeuchi, Shoji ; Suzuki, Takafumi ; Mabuchi, Kunihiko ; Fujita, Hiroyuki

  • Author_Institution
    Center for Int. Res. on Micro Mechatronics, Univ. of Tokyo, Japan
  • fYear
    2003
  • fDate
    19-23 Jan. 2003
  • Firstpage
    367
  • Lastpage
    370
  • Abstract
    A 3D flexible multichannel micro probe array is proposed. Since each probe has several recording pads, the probe array can measure neural activity at various depths in the brain. They can be easily fabricated with the interconnections, using the folding process of planar probe structures. This flexible probe array can be inserted into a rat´s brain without fracture and has successfully measured neural signals.
  • Keywords
    biosensors; brain; microsensors; 3D flexible multichannel probe array; brain; neural activity; planar probe structures; Assembly; Brain; Electrodes; Fabrication; Magnetic fields; Microelectromechanical devices; Micromachining; Polyimides; Probes; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7744-3
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2003.1189762
  • Filename
    1189762