DocumentCode
3332896
Title
3D flexible multichannel probe array
Author
Takeuchi, Shoji ; Suzuki, Takafumi ; Mabuchi, Kunihiko ; Fujita, Hiroyuki
Author_Institution
Center for Int. Res. on Micro Mechatronics, Univ. of Tokyo, Japan
fYear
2003
fDate
19-23 Jan. 2003
Firstpage
367
Lastpage
370
Abstract
A 3D flexible multichannel micro probe array is proposed. Since each probe has several recording pads, the probe array can measure neural activity at various depths in the brain. They can be easily fabricated with the interconnections, using the folding process of planar probe structures. This flexible probe array can be inserted into a rat´s brain without fracture and has successfully measured neural signals.
Keywords
biosensors; brain; microsensors; 3D flexible multichannel probe array; brain; neural activity; planar probe structures; Assembly; Brain; Electrodes; Fabrication; Magnetic fields; Microelectromechanical devices; Micromachining; Polyimides; Probes; Silicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN
1084-6999
Print_ISBN
0-7803-7744-3
Type
conf
DOI
10.1109/MEMSYS.2003.1189762
Filename
1189762
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