Design of a linear guideway on rolling elements for ultra precision meso-machine tools

Linear guideways, which are primary elements of ultra precision meso-machine tools, need reviewed considerations. Conceptual design of a ball bearing linear stage with limited dimensions is proposed. Evaluation of the table motion errors is worked based on the criteria that the balls always remain in elastic contact. Influences of the waviness of tracks, initial interference and resultant external load upon the perturbation displacement are taken into consideration.