DocumentCode
3350357
Title
Sensitivity Theory Application in MEMS Design
Author
Teslyuk, V. ; Lobur, M. ; Zaharyuk, R. ; Tarik, Al Omari
fYear
2007
fDate
19-24 Feb. 2007
Firstpage
536
Lastpage
537
Abstract
In this paper the application of the sensitivity theory is proposed as a tool to increase computer aided design quality.
Keywords
CAD; capacitive sensors; microsensors; MEMS; capacitive sensor; computer aided design; sensitivity theory; Application software; Batch production systems; Costs; Design automation; Electrical engineering; Microelectromechanical devices; Microelectronics; Micromechanical devices; Nonlinear optics; Optical sensors; CAD; MEMC; sensitivity theory;
fLanguage
English
Publisher
ieee
Conference_Titel
CAD Systems in Microelectronics, 2007. CADSM '07. 9th International Conference - The Experience of Designing and Applications of
Conference_Location
Lviv-Polyana
Print_ISBN
966-533-587-0
Type
conf
DOI
10.1109/CADSM.2007.4297642
Filename
4297642
Link To Document