VHDL-AMS models in MEMS simulations

This paper is devoted to modeling and simulation of MEMS devices using VHDL-AMS language. Before constructing a prototype, a simulation of the whole system is necessary to check the functionality of individual components and their interaction. For MEMS, a design environment is needed which allows simulation of different physical domains including coupling effects. VHDL-AMS is a flexible system description language suitable for matching such requirements. Additionally, it allows to describe and to simulate the system at different levels of abstraction.