A multi-grid method to solve the squeeze film damping of micro-resonator

Author

Shanmin, Huang ; Pu, Li ; Yuming, Fang

Author_Institution

Sch. of Mech. Eng., Southeast Univ., Nanjing, China

fYear

2010

fDate

26-28 June 2010

Firstpage

3222

Lastpage

3225

Abstract

Predicting squeeze film damping is crucial in the design of MEMS devices. In view of the problems existing in the process of solving squeeze film damping, a multi-grid method is used to solve the squeeze film damping of micro-resonator, and a satisfying result is obtained. The multi-grid algorithm is considered having the advantage of rapid convergence and good numerical stability when solving the liquid questions of squeeze film damping. The pressure distribution functions between resonator plates and the value of various performance indicators are obtained. The relationships between the frequency and the amplitude also the frequency and the phase as well as the characteristics of damping force are obtained.

Keywords

damping; iterative methods; microcavities; micromechanical resonators; vibrations; MEMS devices design; microresonator; multigrid method; numerical stability; pressure distribution functions; squeeze film damping; Boundary conditions; Damping; Differential algebraic equations; Finite difference methods; Frequency; Geometry; Mechanical engineering; Nonlinear equations; Partial differential equations; Voltage; Micro-resonator; difference multi-grid method; squeeze film damping;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-7737-1

Type

conf

DOI

10.1109/MACE.2010.5535764

Filename

5535764