ULSI inspection system using digital scanning confocal microscopy with applications to PZT film

Author

Ichikawa, Yoshiharu ; Toriwaki, Jun-ichiro

Author_Institution

Manuf. Technol. Centre, Texas Instrum. Japan Ltd., Ibaraki, Japan

fYear

1995

fDate

17-19 Sep 1995

Firstpage

112

Lastpage

115

Abstract

The Scanning Confocal Microscope has been proposed as an observation method of the 3D objects with a high aspect ratio in the field of biology, physics and electronics etc. By processing a confocal microscopy 2D image which is a kind of tomogram by the optical sectioning, we have developed a new inspection method of the 3D structure of the semiconductor device. In this paper, we describe a reconstruction of the surface microstructure and its application to PZT film with Digital Scanning Confocal Microscopy

Keywords

DRAM chips; ULSI; capacitors; inspection; integrated circuit testing; lead compounds; optical microscopy; optical tomography; piezoceramics; 3D objects; PZT; PZT film capacitor; PbZrO3TiO3; ULSI; aspect ratio; digital scanning confocal microscopy; inspection system; optical sectioning; surface microstructure; tomogram; Biomedical optical imaging; Image reconstruction; Inspection; Optical devices; Optical films; Optical microscopy; Physics; Scanning electron microscopy; Semiconductor devices; Ultra large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on

Conference_Location

Austin, TX

Print_ISBN

0-7803-2928-7

Type

conf

DOI

10.1109/ISSM.1995.524371

Filename

524371